Information request: Atomic Force Microscope for VTT Micronova cleanroom

The object of this information request is Atomic Force Microscope (later “AFM”). VTT is preparing the procurement of a new AFM in VTT's microelectronics cleanroom located in Espoo, Finland (VTT Micronova). With this information request, VTT is searching potential suppliers and equipment available to get information on suppliers capable of delivering the equipment described in this information request.

The object of the information request is Atomic Force Microscope (later “AFM”). VTT is preparing the procurement of a new AFM in VTT's microelectronics cleanroom located in Espoo Finland (VTT Micronova). AFM and its associated analyses modes are essential methods in R&D, but are widely used for quality control. In VTT the userbase is also extremely varied and therefore, the AFM needs to be very flexible, easy-to-use, and automated fulfilling research requirements (small specimen and chips) combined with full 200-mm wafer quality control features for novice to expert users. Key features and expected performance metrics: Specimen size up to 200-mm wafer size • Fully addressable stage (without needing rotation) for 200 mm wafer size specimens and for smaller specimens with a height of up to 20 mm Measuring modes typical and advanced modes • Contact mode AFM • Tapping (intermittent soft dynamic, or AC) mode AFM/Non-contact mode AFM • Lateral Force Microscopy (LFM) • Phase Imaging • Force Distance (F-D) Spectroscopy • Force volume Mapping • Magnetic Force Microscopy(MFM) • Force Modulation Microscopy(FMM) • Electric Force Microscopy (EFM) • Piezoresponse Force Microscopy (PFM) • Kelvin Probe Microscopy (KPFM) • Conductive AFM (cAFM) • Scanning Capacitance Microscopy (SCM) Scanner capabilities • XY scanner operated in closed-loop • Z scanner operated in both open-loop and closed-loop • XY scanner scan range of at least 100 μm • The scanning probe microscope software must use at least 20-bit digital-to-analog converters (DACs) in order to generate the XY and Z piezo scan signals • XY scanner are position sensored • XY scanner scan position control resolution of 0.1 nm or better • XY scanner position detector noise of less than 0.15nm, rms • XY scanner linearity error of less than 0.5% on each axis • Z scan range of at least 12 μm • Z scanner position is sensored • Z scanner topography noise of less than 0.03 nm (rms) • The linearity error of the Z scanner position detector lower than 2% Automation and motorization • Automatic and motorized laser positioning and detector adjustment controllable in the AFM software with software functions allowing automated measurements from tip insertion onwards for novice users without intervention Software • Including software for data analysis and measurement with continued demonstrated development and support for tool lifetime and facility of migration during computer upgrades • Software is user modifiable with access to source code to expand on software limited functionality without artificial restrictions Stability • Demonstrated stability on the scale of hours using photothermal cantilever excitation Other features and ease of use • Simple cantilever probe exchange, including 3rd party probes • Inclusion of an acoustic enclosure • Turn-key solution from the supplier • Capability to reach atomic resolution

With this information request, VTT inquires your opinion about the following: - Your capability to sell the equipment described above, - Description of the equipment, - Delivery time, - Pricing model. In case you are a supplier of the equipment described in this information request, please send your answer with requested information by e-mail to Patrik Eskelinen, patrik.eskelinen@vtt.fi and Enni Hartikainen enni.hartikainen@vtt.fi, by 12 (Finnish time) 28 October 2021. VTT will make a decision about the possible procurement process and procedure after this survey is completed.