Maskless Lithography Direct Writer

Oulu University Faculty of Biochemistry and Molecular Medicine is conducting research on microfluidics and lab-on-a-chip system where microfluidic devices are fabricated using soft lithography technique. To be used in production of a master mold for soft lithography fabrication, a maskless lithography direct writer system is required. The direct writer will be used to make microfluidic channel designs on 4 inch silicon wafers using SU-8 negative tone photoresist. The aim of the maskless lithography direct writer system is to provide a rapid process in preparing the microchannel master molds and to avoid the standard photolithography instruments which require a mask fabrication step. The maskless lithography direct writer system must transfer microfluidic designs prepared in DXF and GDSII formats to SU8 photoresist spin-coated on 4 inch silicon wafers.