SEMIAUTOMATIC PROBE STATION, WITH 300 MM WAFER CHUCK

VTT was looking to semiautomatic probe station for measuring wafers up to 300mm, with heating and cooling capability. The object of the tender process was “Clean room compatible probe station for low current measurement for wafers up to 300 mm” (later also “Equipment”). The probe station’s primary use is room temperature semi-automated DC- and RF-characterisation (<20 GHz) of electrical components, that can be light sensitive, on single dies (5 mm x 5 mm), 150 mm, 200 mm, or 300 mm wafers. The equipment will be located in a clean room environment (ISO 6). The laboratory has vacuum, N2, and (clean dry air CDA) pressured air connections available. The object of the tender process was described in more detail in the invitation to tender documents.

VTT was looking to semiautomatic probe station for measuring wafers up to 300mm, with heating and cooling capability. The object of the tender process was “Clean room compatible probe station for low current measurement for wafers up to 300 mm” (later also “Equipment”). The probe station’s primary use is room temperature semi-automated DC- and RF-characterisation (<20 GHz) of electrical components, that can be light sensitive, on single dies (5 mm x 5 mm), 150 mm, 200 mm, or 300 mm wafers. The equipment will be located in a clean room environment (ISO 6). The laboratory has vacuum, N2, and (clean dry air CDA) pressured air connections available. The objective was to find one professional supplier who can supply Equipment and installation and user training in its entirety.