Manually operated VPD- and scanner module for VTT Micronova cleanroom

The object of this information request is Manually operated VPD- and scanner module (later “VPD”). VTT is preparing procurement of a new VPD into VTT's microelectronics cleanroom located in Espoo Finland. With this market survey, VTT is searching potential suppliers and equipment available to get additional information on suppliers capable of delivering the equipment described in this information request.

The object of this information request is Manually operated VPD- and scanner module (later “VPD”). VTT is preparing procurement of a new VPD into VTT's microelectronics cleanroom located in Espoo Finland. With this market survey, VTT is searching potential suppliers and equipment available to get additional information on suppliers capable of delivering the equipment described in this information request. Key features: •VPD- and scanner modules must be able to handle 150 mm and 200 mm silicon wafers. •VPD- and scanner modules must be self-contained stand alone-type modules. •Manual sample wafer loading and unloading requested for both modules. •Scanner must close sample vial automatically. •There must be continuous DI-water purge flow through the modules. With this information request, VTT inquires your opinion about the following: -Your capability to sell the equipment described above. -Description of the equipment. -Detection limit for the most common metal elements in ISO4 cleanroom. -Delivery time. -Pricing.

In case you are a supplier of the equipment described in this information request, please send your answer with requested information by e-mail to Harri Ilmari, harri.ilmari@vtt.fi by 12 (Finnish time) August 14th 2023. VTT will make a decision about the possible competitive bidding process after this survey is completed.