Information request: Current in-plane tunnelling (CIPT) prober

The object of the tender process is a current in-plane tunnelling (CIPT) prober (later also “Equipment”). The CIPT prober’s primary use is tunnelling resistance measurements (RA) of blanket tunnel junction stacks. In VTT’s use case, no magnetic field is needed. The equipment will be located in a cleanroom environment with constraint space available for installation. Electric power and pressurized air connections are available, if needed. In VTT’s use case, typical tunnel junction stacks consist of layers of Nb, Al, and Ti, as well as their oxides and nitrides. The most common case is a Nb-Al-AlOx-Nb trilayer, similar to what is described in DOI:10.1088/1361-6668/aa9411. For the specifications below, let us define a “standard stack” for the purposes of the specifications below as a Nb-Al-AlOx-Nb trilayer with square resistance Rt = 2 ± 0.5 Ω/□ for the top layer, square resistance Rb = 2 ± 0.5 Ω/□ for the bottom layer, and RA = 200 ± 100 Ω∙µm2 for the tunnel barrier. The technical specification of the equipment is discussed in more detail in Annex 1.