High-resolution Scanning electron microscope (SEM)

Tampere University Foundation sr is inviting tenders for 'High-resolution Scanning electron microscope (SEM)', hereinafter also as 'SEM'.

Tampere University (TAU) will replace a field emission scanning electron microscope (SEM) situated in a clean room environment with a new high-resolution SEM. The purpose of this procurement is to enable state-of-the-art imaging, particularly focusing on high-resolution imaging of semiconductor samples in various stages of processing. The most common use case is imaging of multiple small samples, but as a part of building the workflows toward 200 mm wafer size, the system should be able to image large samples as close to the full wafer size as possible. New SEM will be a part of the advanced electron microscopy facilities at Tampere Microscopy Center (https://www.tuni.fi/en/research/tampere-microscopy-center) and the Micro- and nanofabrication clean room facilities (https://www.tuni.fi/en/research/micro-and-nanofabrication) at Tampere University. The system will be in a multiple user environment and therefore flexibility, ease-of-use and high performance are emphasized for this procurement. = = = = PRICING: Contracting authority sets forcing top price for the offered instrument. Max budget to be spent is 575 000 € (excl. VAT) covering the mandatory requirements. = = = = TO BE NOTED: Pls pay extra attention to the call attachments: - (Appendix 1) Requirements for Scanning Electron Microscope (SEM), - (Appendix 2) Tender entry form.