DUV Stepper 200mm

THE OBJECT OF THE TENDER PROCESS The object of the procurement is DUV Stepper 200 mm. The technical specification of the object of the tender and its minimum requirements is described in more detail in this Annex 1 of the invitation to tender. The tendered Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1 and Annex 2 (“Facilities, materials and connector types”). A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 80 % price weighting and 20 % quality weighting. A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1. Partial tenders will not be accepted. NON-MANDATORY OPTIONAL FEATURES Please see Annex 1 section 2.7 of the invitation to tender.

The object of the tender process is described in more detail in the invitation to tender documents.