200 mm coating and developing track tool

THE OBJECT OF THE TENDER PROCESS The object of the tender process is 200 mm coating and developing track tool (later also “track tool” or “Tool”) for the VTT Micronova cleanroom semiconductor front end. The procurement involves a single cassette-to cassette tool with spin coating and developing stations and hot and cool plates. The coating and developing track tool is intended to support silicon semiconductor front end processing of 200 mm wafers, facilitating exposure by stepper or automated mask aligner. The technical specification of the object of the tender is described in more detail in this Annex 1 of the invitation to tender. The Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1. A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 100 % price weighting . A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1. The object of the tender process is described in more detail in the invitation to tender documents. Partial tenders will not be accepted. OPTIONS (mandatory) The following are mandatory options (to be offered): - Maintenance contract (See section Maintenance contract option), - Additional warranty (+ 12 months) (See section Additional warranty) VTT does not commit to purchase the options. The price(s) of the option(s) are not taken into account when comparing tenders. PROCEDURE The contracting entity has suspended the previous procurement procedure VTT 24/206/2024 for the subject of the procurement. This is a new separate call for tenders. Annex 1 of the previous call for tenders has been updated slightly, as it was found that some of the requirements in section 3.1 were open to interpretation.

The object of the tender process is described in more detail in the invitation to tender documents.